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25 June 1998 Multilayer optics for x-ray and γ radiation
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Proceedings Volume 3406, Current Russian Research in Optics and Photonics: New Methods and Instruments for Space- and Earth-based Spectroscopy in XUV, UV, IR, and Millimeter Waves; (1998) https://doi.org/10.1117/12.310983
Event: Current Russian Research in Optics and Photonics: New Methods and Instruments for Space- and Earth-Based Spectroscopy in XUV, UV, IR, 1998, none, Russian Federation
Abstract
We report the experimental results on production of multilayer soft x-ray and EUV mirrors and their application in x-ray spectroscopy and fluorescence analysis, as well as for development of EUV lithographic and x-ray microscopic devices and soft x-ray point sources. The problem of the production and the investigation of short-period x-ray multilayers and multilayer (gamma) -filters is discussed.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. S. Andreev, Sergey V. Gaponov, Nikolai N. Salashchenko, E. A. Shamov, Leonid A. Shmaenok, Sergei V. Bobashev, Dmitrii M. Simanovski, and Eugene N. Ragozin "Multilayer optics for x-ray and γ radiation", Proc. SPIE 3406, Current Russian Research in Optics and Photonics: New Methods and Instruments for Space- and Earth-based Spectroscopy in XUV, UV, IR, and Millimeter Waves, (25 June 1998); https://doi.org/10.1117/12.310983
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