29 September 1998 Aberrations of an optical system in the field heterodyne interferometer
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Proceedings Volume 3407, International Conference on Applied Optical Metrology; (1998) https://doi.org/10.1117/12.323369
Event: International Conference on Applied Optical Metrology, 1998, Balatonfured, Hungary
Abstract
Heterodyne interferometry method for shape measurement based on the fringe projection is presented. Fringe pattern is displacing in the measurement field due to the interference of beams with slightly shifted frequencies. The phase difference of signals detected by matrix of detectors gives the information about the shape of surface under investigation. Phase measurement errors generated by imaging optical system are given.
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Tomasz S. Tkaczyk, Tomasz S. Tkaczyk, Romulad Jozwicki, Romulad Jozwicki, } "Aberrations of an optical system in the field heterodyne interferometer", Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); doi: 10.1117/12.323369; https://doi.org/10.1117/12.323369
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