29 September 1998 Contour mapping of the shape difference between two objects by holographic interferometry with reduced sensitivity
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Proceedings Volume 3407, International Conference on Applied Optical Metrology; (1998) https://doi.org/10.1117/12.323310
Event: International Conference on Applied Optical Metrology, 1998, Balatonfured, Hungary
Abstract
The survey of main trends in holographic study of the surface shape for diffusely reflective objects is made in the paper. These methods are the basis for the different methods for direct contour mapping of deviation in shape of the object under study from the master one. The description and comparison of these methods and technique is done in the paper. The dependence of the resulting contour map contrast on the shift of the speckle fields of object and reference wave between the exposures is calculated.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Nadya O. Reingand, Nadya O. Reingand, } "Contour mapping of the shape difference between two objects by holographic interferometry with reduced sensitivity", Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); doi: 10.1117/12.323310; https://doi.org/10.1117/12.323310
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