29 September 1998 Digital shearography for slope measurement
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Proceedings Volume 3407, International Conference on Applied Optical Metrology; (1998); doi: 10.1117/12.323331
Event: International Conference on Applied Optical Metrology, 1998, Balatonfured, Hungary
Abstract
This paper presents an electronic speckle shearing interferometry optical method for the full field measurement of the slope of an object. The object under study is placed on a rotatable platform and illuminated by an expanded laser beam. Its image is recorded by a shearing CCD camera and stored directly into a computer. By recording the two images before and after giving the object a small angle of rotation, the resulting correlation fringe pattern which represents the object surface slope can be obtained. Theory of the new method and some experimental results are presented.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Huai Min Shang, Y. M. He, Cho Jui Tay, "Digital shearography for slope measurement", Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); doi: 10.1117/12.323331; https://doi.org/10.1117/12.323331
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KEYWORDS
Speckle

Fringe analysis

Interferometry

Light sources

CCD cameras

Shearography

Aluminum

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