29 September 1998 Grating microinterferometer for local in-plane displacement/strain field analysis
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Proceedings Volume 3407, International Conference on Applied Optical Metrology; (1998) https://doi.org/10.1117/12.323361
Event: International Conference on Applied Optical Metrology, 1998, Balatonfured, Hungary
Abstract
Micromechanical elements analysis require the local approach to their behavior and material constants. In the paper the automated grating microinterferometer GMI for in-plane displacement/strain measurement in a region smaller than 1 X 1 mm2 is presented. It is based on the concept of achromatic grating interferometer combined with glass block waveguide and designed for the work with standard optical microscopes. The interferogram obtained may be modified and design for both temporal and carrier frequency phase shifting methods. The methodology of measurement is described and the example of GMI application is given.
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Leszek A. Salbut, Leszek A. Salbut, Malgorzata Kujawinska, Malgorzata Kujawinska, } "Grating microinterferometer for local in-plane displacement/strain field analysis", Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); doi: 10.1117/12.323361; https://doi.org/10.1117/12.323361
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