29 September 1998 Holographic microscopic interferometry with respect to the estimation of stress and strain in micro-opto-electro-mechanical systems (MOEMS)
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Proceedings Volume 3407, International Conference on Applied Optical Metrology; (1998); doi: 10.1117/12.323339
Event: International Conference on Applied Optical Metrology, 1998, Balatonfured, Hungary
Abstract
Holographic microscopy with conjugate reconstruction for the interferometric determination of three-dimensional displacement was used for the investigation of the mechanical behavior of micromechanic and microelectronic components. An experimental set-up for the exposure of the holographic interferograms was used for the application of the spatial heterodyne technique, for the application of phase shifting, and for electro-optic holography. Three holograms for different illumination directions recorded on one holographic plate are reconstructed conjugately, and spatial heterodyne technique a well as phase shift technique were used to evaluate the interferograms. Only by conjugated reconstruction it is possible to obtain a perfectly optimized interferometer for the static evaluation method. The evaluation of interferograms which are strongly disturbed by speckle noise can be performed successfully. A comparison of the results of the application of both techniques is given. The influence of the speckle effect on the resolution was investigated.
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Guenther K.G. Wernicke, Oliver Kruschke, Nazif Demoli, Hartmut Gruber, "Holographic microscopic interferometry with respect to the estimation of stress and strain in micro-opto-electro-mechanical systems (MOEMS)", Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); doi: 10.1117/12.323339; https://doi.org/10.1117/12.323339
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KEYWORDS
Holography

Holograms

Speckle

Interferometers

Microopto electromechanical systems

Holographic interferometry

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