Near-field optical metrology

Michel Spajer

doi:10.1117/12.323341

29 September 1998 Near-field optical metrology

Michel Spajer

Proceedings Volume 3407, International Conference on Applied Optical Metrology; (1998) https://doi.org/10.1117/12.323341
Event: International Conference on Applied Optical Metrology, 1998, Balatonfured, Hungary

Abstract

The relations of Near Field Optics with Metrology are of two kinds. First, it shifts the resolution limit towards the nanometer scale. This improvement is due to a strong interaction between the probe and the sample and its consequence for the quantitative interpretation is a non- linear relation between the image and the object. Secondly, Near Field Optics uses some of the classical detection methods of metrology such as heterodyne interferometry and image processing.

Citation Download Citation

Michel Spajer "Near-field optical metrology", Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); https://doi.org/10.1117/12.323341

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