Shear ESPI with small objects

Rajpal S. Sirohi; Cho Jui Tay; Huai Min Shang; W. P. Boo

doi:10.1117/12.323336

29 September 1998 Shear ESPI with small objects

Rajpal S. Sirohi, Cho Jui Tay, Huai Min Shang, W. P. Boo

Proceedings Volume 3407, International Conference on Applied Optical Metrology; (1998) https://doi.org/10.1117/12.323336
Event: International Conference on Applied Optical Metrology, 1998, Balatonfured, Hungary

Abstract

Shear ESPI has been applied for the NDT of objects under magnification. A method to obtain the thickness of the defect (assumed to be circular diaphragm on a rigid boundary) from the Shear ESPI data is presented. Experiments conducted on programmed defects establish the validity of the procedure; and thickness estimates with less than 10% departure from the nominal values are obtained.

Citation Download Citation

Rajpal S. Sirohi, Cho Jui Tay, Huai Min Shang, and W. P. Boo "Shear ESPI with small objects", Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); https://doi.org/10.1117/12.323336

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