29 September 1998 Surface profilometry by wavelength scanning interferometry
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Proceedings Volume 3407, International Conference on Applied Optical Metrology; (1998) https://doi.org/10.1117/12.323305
Event: International Conference on Applied Optical Metrology, 1998, Balatonfured, Hungary
Parallel and absolute measurement of surface profiles are realized on objects including diffuse surfaces and discontinuities such as steps and holes. Sensitivity and range of measurements have been examined by using a dye laser with tuning range of 4.2 nm. Their dependences on axial positions and tilt angle are investigated experimentally for diffuse objects and milled ones. A narrow dip and a screw head that cannot be measured by other methods could be analyzed by the present method.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ichirou Yamaguchi, Akihiro Yamamoto, Masaru Yano, "Surface profilometry by wavelength scanning interferometry", Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); doi: 10.1117/12.323305; https://doi.org/10.1117/12.323305

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