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1 June 1998 Vibration measurement by atomic force microscopy with laser readout
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Proceedings Volume 3411, Third International Conference on Vibration Measurements by Laser Techniques: Advances and Applications; (1998) https://doi.org/10.1117/12.307752
Event: Third International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, 1998, Ancona, Italy
Abstract
Micromachined cantilever beams are widely used for different microengineering and nanotechnology actuators and sensors applications. The micromechanical cantilever tip-based data storage devices with reading real data at the rates exceeding 1Mbit/s have been demonstrated. The vibrational noise spectrum of a cantilever limits the data storage resolution. Therefore the possibility to measure the microvibrations and acoustic fields in different micromachined devices are of great interest. We describe a method to study a micromechanical cantilever and surface vibrations based on laser beam deflection measurements. The influence of piezoelectric plate vibrations and the tip- surface contact condition on the cantilever vibrations were investigated in the frequency range of 1-200 kHz. The experiments were performed using the measurement results. The V-shaped cantilevers exited by the normal vibrations due to the non-linearity at the tip-surface contact vibrates with a complex motion and has a lateral vibration mode coupled with normal vibration mode. The possibility to use laser deflection technique for the vibration measurements in micromachined structures with nano resolution is shown.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Valentinas J. Snitka, Vida Mizariene, Margiris Kalinauskas, and Paulius Lucinskas "Vibration measurement by atomic force microscopy with laser readout", Proc. SPIE 3411, Third International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (1 June 1998); https://doi.org/10.1117/12.307752
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