Development of a fast beam-blanking system

Munehiro Ogasawara; Hitoshi Sunaoshi; Ryoji Yoshikawa

doi:10.1117/12.328808

1 September 1998 Development of a fast beam-blanking system

Munehiro Ogasawara; Hitoshi Sunaoshi; Ryoji Yoshikawa

Author Affiliations +

Proceedings Volume 3412, Photomask and X-Ray Mask Technology V; (1998) https://doi.org/10.1117/12.328808
Event: Photomask Japan '98 Symposium on Photomask and X-Ray Mask Technology V, 1998, Kawasaki City, Japan

Abstract

In order to obtain a precise dose control for proximity effect correction, a fast beam blanking system has been developed which can make possible the fine control of the beam pulse width with precision of less than 1 nanosecond. The system consists of a high precision blanker driving circuit and a blanking structure suitable for fast operation. The blanker driving circuit controls the pulse width by selecting delay line logic with required delay. The pulse width control of less than 1 nanosecond and pulse rising time of less than 10 nanoseconds were achieved. A coaxial structure was adopted for the blanking structure. The simulation study has shown that a blanking structure with low reflectance in a few GHz range is achievable. The pulse passed through an experimental blanking structure without distortion in waveform.

Citation Download Citation

Munehiro Ogasawara, Munehiro Ogasawara, Hitoshi Sunaoshi, Hitoshi Sunaoshi, Ryoji Yoshikawa, Ryoji Yoshikawa, } "Development of a fast beam-blanking system", Proc. SPIE 3412, Photomask and X-Ray Mask Technology V, (1 September 1998); doi: 10.1117/12.328808; https://doi.org/10.1117/12.328808

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