1 September 1998 Foundry mask shop in Taiwan
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Proceedings Volume 3412, Photomask and X-Ray Mask Technology V; (1998) https://doi.org/10.1117/12.328856
Event: Photomask Japan '98 Symposium on Photomask and X-Ray Mask Technology V, 1998, Kawasaki City, Japan
Abstract
Foundry maskshop is deemed to be one of the major contributors to the success of a wafer foundry fab. Our maskshop has two unique features. First, we have highly automated information cross-flow between the wafer fab and maskshop. Second, we develop mask technology together with photolithography technology in wafer fabs.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chue-San Yoo, Chue-San Yoo, Jia-Jing Wang, Jia-Jing Wang, } "Foundry mask shop in Taiwan", Proc. SPIE 3412, Photomask and X-Ray Mask Technology V, (1 September 1998); doi: 10.1117/12.328856; https://doi.org/10.1117/12.328856
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