The increasing demand for highly developed ceramic materials for various applications calls for innovative machining technologies yielding high accuracy and efficiency. Associated problems with conventional, i.e. mechanical methods, are unacceptable tool wear as well as force induced damages on ceramic components. Furthermore, the established grinding techniques often meet their limits if accurate complex 2D or 3D structures are required. In contrast to insufficient mechanical processes, UV-laser precision machining of ceramics offers not only a valuable technological alternative but a considerable economical aspect as well. In particular, excimer lasers provide a multitude of advantages for applications in high precision and micro technology. Within the UV wavelength range and pulses emitted in the nano-second region, minimal thermal effects on ceramics and polymers are observed. Thus, the ablation geometry can be controlled precisely in the lateral and vertical directions. In this paper, the excimer laser machining technology developed at the Laser Zentrum Hannover is explained. Representing current and future industrial applications, examinations concerning the precision cutting of alumina (Al2O3), and HF-composite materials, the ablation of ferrite ceramics for precision inductors and the structuring of SiC sealing and bearing rings are presented.