Waveguide scattering microscopy in air and water

Frank Thoma; John Armitage; Hugues Trembley; Bernhard Menges; Uwe Langbein; Silvia Mittler-Neher

doi:10.1117/12.323536

24 September 1998 Waveguide scattering microscopy in air and water

Frank Thoma, John Armitage, Hugues Trembley, Bernhard Menges, Uwe Langbein, Silvia Mittler-Neher

Proceedings Volume 3414, Opto-Contact: Workshop on Technology Transfers, Start-Up Opportunities,and Strategic Alliances; (1998) https://doi.org/10.1117/12.323536
Event: Lasers and Materials in Industry and Opto-Contact Workshop, 1998, Quebec, Canada

Abstract

Scattering optical waveguide microscopy is a novel imaging technique, that allows for the microscopic characterization of thin film samples by using the evanescent field of a guided optical wave as the illuminating light source. The image contrast is generated by the scattered intensity of the thin film sample within the evanescent field. Excellent lateral resolution (< 1 micrometers ) is demonstrated for an evaporated SiO_x grating. Immersion microscopy has been performed with an additional cuvette in the same setup. The contrast of the image is investigated with respect to mode number and polarization of the illuminating, propagating waveguide mode and the surface roughness of the sample.

Citation Download Citation

Frank Thoma, John Armitage, Hugues Trembley, Bernhard Menges, Uwe Langbein, and Silvia Mittler-Neher "Waveguide scattering microscopy in air and water", Proc. SPIE 3414, Opto-Contact: Workshop on Technology Transfers, Start-Up Opportunities,and Strategic Alliances, (24 September 1998); https://doi.org/10.1117/12.323536

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