The methods of organic thin film deposition with determined optical properties include several interrelated steps: the precursor synthesis, which chemical structure takes into account deposition conditions; deposition conditions, which takes into account both precursor properties and film properties needed; additional film treatment. By this approach use, the polymers, dyes, metal- and dye-filled polymers were produced by vacuum and laser evaporation, plasma polymerization, combined methods. Films were studied by VIS, IR, Raman spectroscopy, electron microscopy etc. Many organic compounds with complicated chemical structure can be deposited in vacuum and plasma. These films posses unique properties of precursors. The studies of polymer, dye and metal-filled films for write once read many optical media reveal their good characteristics.