Progress in high-power VCSELs and arrays

Rainer Michalzik; Martin Grabherr; Roland Jaeger; Michael Miller; Karl Joachim Ebeling

doi:10.1117/12.311008

22 June 1998 Progress in high-power VCSELs and arrays

Rainer Michalzik, Martin Grabherr, Roland Jaeger, Michael Miller, Karl Joachim Ebeling

Proceedings Volume 3419, Optoelectronic Materials and Devices; 34190P (1998) https://doi.org/10.1117/12.311008
Event: Asia Pacific Symposium on Optoelectronics '98, 1998, Taipei, Taiwan

Abstract

Recent achievements in the design and fabrication of monolithic high power vertical cavity surface emitting lasers (VCSELs) are reviewed and major distinctions between the scaling properties of top and bottom emitting devices clarified. Although a few hundred milliwatts optical power can be extracted from a single bottom emitting laser, decreasing efficiencies with increasing device diameter suggest the investigation of 2D laser arrays. First experimental results are presented, featuring oxide confined VCSEL arrays at 980 nm wavelength with 3 X 3 elements and maximum output powers up to 650 mW, still delivering 270 mW with 25 percent conversion efficiency under continuous wave operation. With further optimizations of device size and array pitch, emitted power densities averaged over the entire chip area in excess of 1 kW/cm² should be attainable.

Citation Download Citation

Rainer Michalzik, Martin Grabherr, Roland Jaeger, Michael Miller, and Karl Joachim Ebeling "Progress in high-power VCSELs and arrays", Proc. SPIE 3419, Optoelectronic Materials and Devices, 34190P (22 June 1998); https://doi.org/10.1117/12.311008

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