22 June 1998 Performance evaluation of a lead-titanate (PbTiO3) pyroelectric thin-film infrared sensor with temperature isolation improvement structure by microelectromechanical system (MEMS) technologies
Author Affiliations +
Proceedings Volume 3419, Optoelectronic Materials and Devices; 34190U (1998) https://doi.org/10.1117/12.311014
Event: Asia Pacific Symposium on Optoelectronics '98, 1998, Taipei, Taiwan
Abstract
An IR sensor with the lead-titanate thin-film using the technology of micro-electro-mechanical systems to achieve a better thermal isolation structure has been fabricated and developed. The major IR-sensing part on the cantilever beam with dimensions of 200 X 100 X 2 micrometers 3 consists of a 500-angstrom lead-titanate layer deposited by RF sputtering, and an evaporated bismuth layer. This thermal isolation improved structure exhibits a much superior performance to that of a traditional IR-sensing bulk structure on the experimental results, which show a 200 percent and 300 percent improvement in current gain under the incident optical power 500 (mu) W and 6V applied bias at room temperature and 77 degrees K, respectively.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jyh-Jier Ho, Jyh-Jier Ho, Yuen Keun Fang, Yuen Keun Fang, Chin-Ying Chen, Chin-Ying Chen, G. S. Chen, G. S. Chen, M. S. Ju, M. S. Ju, } "Performance evaluation of a lead-titanate (PbTiO3) pyroelectric thin-film infrared sensor with temperature isolation improvement structure by microelectromechanical system (MEMS) technologies", Proc. SPIE 3419, Optoelectronic Materials and Devices, 34190U (22 June 1998); doi: 10.1117/12.311014; https://doi.org/10.1117/12.311014
PROCEEDINGS
0 PAGES


SHARE
Back to Top