22 June 1998 Precise automatic alignment of a pinhole integrated with photodiodes
Author Affiliations +
Proceedings Volume 3419, Optoelectronic Materials and Devices; 34191D (1998) https://doi.org/10.1117/12.311035
Event: Asia Pacific Symposium on Optoelectronics '98, 1998, Taipei, Taiwan
The spatial filter of a Si micromachined pinhole integrated with photodiodes is fabricated. The photodiode cells placed around the center pinhole can detect the relative position between the incident beam spot and the pinhole. In our previous study, the automatic alignment of the pinhole realized the accuracy of 1 micrometers using the feedback control based on the obtained position signal. To increase the alignment accuracy, the suitable design of the pinhole and the photodiode cell is necessary, since it decides the sensitivity to the laser spot position. The sensitivity is examined changing the separation length between the photodiode cells.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Minoru Sasaki, Minoru Sasaki, Yuji Arai, Yuji Arai, Wataru Kamada, Wataru Kamada, Kazuhiro Hane, Kazuhiro Hane, } "Precise automatic alignment of a pinhole integrated with photodiodes", Proc. SPIE 3419, Optoelectronic Materials and Devices, 34191D (22 June 1998); doi: 10.1117/12.311035; https://doi.org/10.1117/12.311035


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