17 June 1998 TFT laser annealing systems in industrial production processes
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Proceedings Volume 3421, Display Technologies II; (1998) https://doi.org/10.1117/12.311066
Event: Asia Pacific Symposium on Optoelectronics '98, 1998, Taipei, Taiwan
Abstract
As the use of TFT flat panels in today's technology is rapidly increasing, there is further need for advanced production processing. New such systems have to fulfill multiple tasks combining latest research data with manufacturing requirements. Improvements in laser technology as lifetime extension of components and reduction of energy fluctuations have led to the acceptance of these new manufacturing devices on the production floor. Additionally 'state of the art' optics and handling units were introduced to fulfill the industrial demands.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Burkhard Fechner, Burkhard Fechner, } "TFT laser annealing systems in industrial production processes", Proc. SPIE 3421, Display Technologies II, (17 June 1998); doi: 10.1117/12.311066; https://doi.org/10.1117/12.311066
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