Paper
18 June 1998 Characteristics of heater film for ink-jet printhead
Sao-Ling Chiu, DongSing Wuu, Yi-Yung Wu
Author Affiliations +
Proceedings Volume 3422, Input/Output and Imaging Technologies; (1998) https://doi.org/10.1117/12.311104
Event: Asia Pacific Symposium on Optoelectronics '98, 1998, Taipei, Taiwan
Abstract
In a thermal bubble inkjet printhead, thin film resistor plays the most important role. The thin film resistor must fire about 1 billion times during the device operation. During firing, temperatures are up to 400 degrees Celsius and the duration is on the order of microseconds. In this situation, the resistance stability and mechanical property of the thin film resistor are critical for fabrication. In this study, resistivity and stress behavior related to a wild range of Ta- Al compositions are examined.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sao-Ling Chiu, DongSing Wuu, and Yi-Yung Wu "Characteristics of heater film for ink-jet printhead", Proc. SPIE 3422, Input/Output and Imaging Technologies, (18 June 1998); https://doi.org/10.1117/12.311104
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Cited by 5 scholarly publications.
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KEYWORDS
Aluminum

Thin films

Tantalum

Resistors

Inkjet technology

Resistance

Printing

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