14 July 1998 Excimer-laser-induced permanent electrically conducting sites in polymers for microelectronic applications
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Proceedings Volume 3423, Second GR-I International Conference on New Laser Technologies and Applications; (1998) https://doi.org/10.1117/12.316612
Event: Second GR-I International Conference on New Laser Technologies and Applications, 1997, Olympia, Greece
Abstract
It has been demonstrated that the laser irradiation of the specially synthesized polymer Poly(bis-alkylthio-acetylene)- PATAC induces the generation of highly permanently conducting sites in the material which remains an insulator in the unexposed areas. Conductivity changes by 16 orders of magnitude have been observed. The conductivity values of the final reaction products are in the level of a heavily doped semiconductor. These conductivity values make the PATAC coated materials suitable for microelectronic applications such as the laser direct imaging of conducting paths and circuit structures.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hans-Klaus Roth, Hans-Klaus Roth, Constantine D. Skordoulis, Constantine D. Skordoulis, M. Schroedner, M. Schroedner, I. Stohn, I. Stohn, A. Bolovinos, A. Bolovinos, E. Bakalis, E. Bakalis, } "Excimer-laser-induced permanent electrically conducting sites in polymers for microelectronic applications", Proc. SPIE 3423, Second GR-I International Conference on New Laser Technologies and Applications, (14 July 1998); doi: 10.1117/12.316612; https://doi.org/10.1117/12.316612
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