Laser-induced deposition and etching of tungsten microstructures

K. Piglmayer; H. Schieche; R. Chabicovsky

doi:10.1117/12.316606

14 July 1998 Laser-induced deposition and etching of tungsten microstructures

K. Piglmayer, H. Schieche, R. Chabicovsky

Proceedings Volume 3423, Second GR-I International Conference on New Laser Technologies and Applications; (1998) https://doi.org/10.1117/12.316606
Event: Second GR-I International Conference on New Laser Technologies and Applications, 1997, Olympia, Greece

Abstract

Micron-sized deposition and etching of W in WF₆ + H₂ atmosphere is investigated by local laser-induced heating of thin tungsten layers on quartz substrates. The process is strongly dependent on the partial pressures of the two gases. A process with high amount of hydrogen permits deposition of W, whereas etching of W occurs if the working gas does not contain hydrogen.

Citation Download Citation

K. Piglmayer, H. Schieche, and R. Chabicovsky "Laser-induced deposition and etching of tungsten microstructures", Proc. SPIE 3423, Second GR-I International Conference on New Laser Technologies and Applications, (14 July 1998); https://doi.org/10.1117/12.316606

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