14 July 1998 Pulsed laser deposition and laser machining of diamondlike carbon films
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Proceedings Volume 3423, Second GR-I International Conference on New Laser Technologies and Applications; (1998) https://doi.org/10.1117/12.316604
Event: Second GR-I International Conference on New Laser Technologies and Applications, 1997, Olympia, Greece
Abstract
Recently the application of pulsed laser deposition (PLD) technique to grow different material of relevant interest for applications, especially in the field of micro devices, has been considered. We show that thin films of diamond like carbon (DLC) can be grown by means of the PLD technique, using an XeCl excimer laser. Their characterization was carried out by SEM, Raman spectroscopy and microindenter. We started a study on the etching mechanism of DLC films for possible applications in microsystems technology.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sergio Martellucci, Giovanni Messina, A. Paoletti, Maria Richetta, S. Santangelo, A. Spena, Antonello Tebano, A. Tucciarone, "Pulsed laser deposition and laser machining of diamondlike carbon films", Proc. SPIE 3423, Second GR-I International Conference on New Laser Technologies and Applications, (14 July 1998); doi: 10.1117/12.316604; https://doi.org/10.1117/12.316604
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