Measurements of the optical functions of uniaxial crystals using two-modulator generalized ellipsometry (2-MGE)

Gerald E. Jellison Jr.; Frank A. Modine; Lynn A. Boatner

doi:10.1117/12.326667

8 October 1998 Measurements of the optical functions of uniaxial crystals using two-modulator generalized ellipsometry (2-MGE)

Gerald E. Jellison Jr., Frank A. Modine, Lynn A. Boatner

Author Affiliations +

Proceedings Volume 3425, Optical Diagnostic Methods for Inorganic Transmissive Materials; (1998) https://doi.org/10.1117/12.326667
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

A new 2-modulator generalized ellipsometer (2-MGE) is used to determine the optical functions of uniaxial materials. This new instrument measures 8 parameters, compared with two parameters measured by standard spectroscopic ellipsometers. These 8 parameters can be used to determine the 6 independent elements in the reduced Jones matrix describing light reflecting from a surface. For orientations of the optical axes significantly different from normal incidence, these measurements can be used to determine the optical functions of uniaxial materials. The resulting optical functions are the most accurate available for photon energies greater than the band gap (where transmission measurements cannot be performed), and they compare well with minimum deviation techniques which are more accurate for photon energies in the transparent region. Several examples will be given, including rutile (TiO₂), ZnO, and BiI₃.

Citation Download Citation

Gerald E. Jellison Jr., Frank A. Modine, and Lynn A. Boatner "Measurements of the optical functions of uniaxial crystals using two-modulator generalized ellipsometry (2-MGE)", Proc. SPIE 3425, Optical Diagnostic Methods for Inorganic Transmissive Materials, (8 October 1998); https://doi.org/10.1117/12.326667

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