Paper
30 October 1998 Analysis of microstructure changes and dynamic processes on rough surfaces using speckle correlation
Thomas Fricke-Begemann, Frank Beyrau, Gerd Guelker, Klaus D. Hinsch, Peter Jauschke, Karin Wolff
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Abstract
The decorrelation of the characteristic speckle pattern, produced by the scattering of coherent light from a random rough surface, is used to monitor changes in the microtopography of the surface. In a basic optical setup minute alterations down to a few nanometers can be measured. To enlighten the basic relations between the speckle field decorrelation and the surface changes a theoretical model is developed, numerical calculations are carried out and comparisons with high resolution AFM measurements on two frozen states of a surface process are undertaken. Whereas the reproducibility of the AFM measurement turns out to be not precise enough to measure nanometer changes on a micrometer scale rough surface, the theoretical model is consistent with results gained from experimental variation of wavelength and angle of illumination and a-priori knowledge about the surface. It is then used to obtain information about magnitude, time constants and statistical parameters of a corrosion process.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thomas Fricke-Begemann, Frank Beyrau, Gerd Guelker, Klaus D. Hinsch, Peter Jauschke, and Karin Wolff "Analysis of microstructure changes and dynamic processes on rough surfaces using speckle correlation", Proc. SPIE 3426, Scattering and Surface Roughness II, (30 October 1998); https://doi.org/10.1117/12.328445
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Cited by 3 scholarly publications.
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KEYWORDS
Corrosion

Light scattering

Speckle

Atomic force microscopy

Speckle pattern

Photoresist materials

Iron

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