Evaluation of in-situ ARS sensors for characterizing smooth and rough surfaces

Andre Kasper; Hendrik Rothe

doi:10.1117/12.328462

30 October 1998 Evaluation of in-situ ARS sensors for characterizing smooth and rough surfaces

Andre Kasper, Hendrik Rothe

Proceedings Volume 3426, Scattering and Surface Roughness II; (1998) https://doi.org/10.1117/12.328462
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

A major problem of in-situ surface characterization by using angle resolved light scattering (ARS) is the contradiction of speed and accurate detection of the scatter signal. During the last years several fast and compact ARS sensors have been developed, namely a fiber optic stray light sensor (FOSSIL) with 516 fibers in 3 azimuths, an integrated optics stray light sensor with 120 waveguides in one azimuth and a planar silicon scatter sensor (PSS) with 8013 detector elements. This paper deals with the evaluation of these sensors and their employment to characterize smooth and rough surfaces. After introducing the sensor setups the theoretical performance of the various sensors is compared. This is done by modeling the properties of the radiation detectors and the arrangements of the sampling points. The real performance is obtained by applying the sensors to surfaces with a known BRDF and comparing the measurements with the expected scatter distributions, i.e. from Lambertian reflection standards and preliminary scatter standards of NIST. Furthermore a set of smooth surfaces (polished silicon and steel) was scanned by an atomic force microscope (AFM) and the computed surface statistics is compared to the values obtained from scatter measurements. Finally, the sensors ability to characterize rough surfaces is shown by using pattern recognition methods.

Citation Download Citation

Andre Kasper and Hendrik Rothe "Evaluation of in-situ ARS sensors for characterizing smooth and rough surfaces", Proc. SPIE 3426, Scattering and Surface Roughness II, (30 October 1998); https://doi.org/10.1117/12.328462

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