30 October 1998 Scatterometer at Korea Research Institute of Standards and Science (KRISS) for bidirectional reflectance distribution function (BRDF)
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Abstract
A description is given of the scatterometer which has been developed at KRISS for BRDF and diffraction pattern measurement. Light source, goniometer, and receiver is described. As a light source, the collimated HeNe and argon ion laser is used, with which the wavelengths of 632.8, 514.5, and 488.0 nm are available. The goniometer has 6 degrees of freedom. The precision of scattering polar angle is enhanced by choosing long rotation arm (length: 1.2 meter) placed on the stepmotor-controlled rotary table whose angle is read by the angle encoder with the resolution of 0.0001 degree and accuracy 0.001 degree. The receiver has a wide dynamic range greater than 1014 in intensity without intensity attenuation and receiver aperture change, which is made by cascading three kinds of detectors: photodiode (PD), photo- multiplier in direct current mode (DC), and photo-multiplier in pulse counting mode (PC). The measured instrument signature and the sinusoidal grating BRDF at the wavelength of 488 nm is presented.
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Byong Chon Park, Byong Chon Park, Yun Woo Lee, Yun Woo Lee, Beomhoan O, Beomhoan O, "Scatterometer at Korea Research Institute of Standards and Science (KRISS) for bidirectional reflectance distribution function (BRDF)", Proc. SPIE 3426, Scattering and Surface Roughness II, (30 October 1998); doi: 10.1117/12.328472; https://doi.org/10.1117/12.328472
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