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29 October 1998 Variable gratings for optical switching: rigorous electromagnetic simulation and design
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Abstract
This paper is devoted to the analysis of the optical performance of movable-beam grating structures with both lateral and vertical displacement of the beams. We show that in the vector-diffraction domain one can design high- efficiency switches (e.g. between beam transmitter and beamsplitter mode) and modulators for polarized radiation. The devices exhibit a good tolerance to fabrication and mounting errors and a functional flexibility. In addition, by simulating the optical performance of polysilicon micro- electro-mechanical grating structures at a visible wavelength, reported in the literature, we demonstrate that our tools for rigorous electromagnetic simulation of grating structures work well in the scalar-diffraction domain.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dan Gani, Mark Auslender, and Shlomo Hava "Variable gratings for optical switching: rigorous electromagnetic simulation and design", Proc. SPIE 3429, Current Developments in Optical Design and Engineering VII, (29 October 1998); https://doi.org/10.1117/12.328539
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