8 December 1998 Design simulation and optimization of micro-optical components
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Abstract
Manufacturing test structures of microsystems and microcomponents is very expensive in terms of time and materials. In conventional design processes, this limits the number of design variants to be considered. For this reason, computer-supported design techniques are becoming more and more important in microsystems technology. The article describes a micro-optical structure as an example demonstrating the factors which disturb the operation of a micro-optical module, and derives a theoretical description of the system under consideration which allows the system parameters to be optimized with respect to the disturbing influences by means of an evolutionary search method.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ingo Sieber, Ingo Sieber, Horst Eggert, Horst Eggert, Helmut Guth, Helmut Guth, Wilfried Jakob, Wilfried Jakob, } "Design simulation and optimization of micro-optical components", Proc. SPIE 3430, Novel Optical Systems and Large-Aperture Imaging, (8 December 1998); doi: 10.1117/12.332468; https://doi.org/10.1117/12.332468
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