5 November 1998 Ultrahigh-resolution electro-optical framing camera for reconnaissance and other applications using a 9216 x 9216 pixel wafer-scale focal plane array
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Abstract
A framing camera incorporating an ultra high resolution CCD detector array comprised of 9,216 by 9,216 pixels is discussed. The detector array measures 8 by 8 centimeters and has been scaled to be fabricated in one piece on a 5 inch diameter silicon wafer. Pixel size is 8.75 by 8.75 microns which gives 57 lp/mm resolution. The detector array features a two frame per second readout capability which allows collection of stereo imagery from very high V/H platforms. Image Motion Compensation is achieved by operating the frame readout clocks during the exposure interval in typical TDI fashion. The high geometric accuracy of pixel placement on the array yields a camera suitable for mapping, reconnaissance, space and astronomy applications. In this paper, measured detector array performance, detector array yield and overall camera performance are presented.
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Bruce Matthews, Bruce Matthews, } "Ultrahigh-resolution electro-optical framing camera for reconnaissance and other applications using a 9216 x 9216 pixel wafer-scale focal plane array", Proc. SPIE 3431, Airborne Reconnaissance XXII, (5 November 1998); doi: 10.1117/12.330201; https://doi.org/10.1117/12.330201
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