HgCdTe-based quantum device nanofabrication

C. H. Lee; Jung B. Choi; J. S. Yook; S. J. Lee; K. W. Park; Soo Ho Bae; Hee Chul Lee; Choong-Ki Kim; Tae Won Kang; Jin-Ki Hong; Sun-Ung Kim; Mann-Jang Park

doi:10.1117/12.328073

26 October 1998 HgCdTe-based quantum device nanofabrication

C. H. Lee, Jung B. Choi, J. S. Yook, S. J. Lee, K. W. Park, Soo Ho Bae, Hee Chul Lee, Choong-Ki Kim, Tae Won Kang, Jin-Ki Hong, Sun-Ung Kim, Mann-Jang Park

Author Affiliations +

Proceedings Volume 3436, Infrared Technology and Applications XXIV; (1998) https://doi.org/10.1117/12.328073
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

We have made nanoscale fabrication for HgCdTe-based Coulomb blockade type quantum devices. Using e-beam lithography and lift-off technique with ZEP resist, multi-lines with 0.1/0.3 nm width and space were nano-patterned on ZnS/HgCdTe surface. SEM and AFM images for the lines display well-splitted patterning result with a little roughing ZnS surface. Split- gate of 200 nm radius was also fabricated on ZnS/MCT for defining nanosize quantum dot. All the work will provide a fundamental basis for the nanofabrication process of HgCdTe- based narrow-gap quantum devices.

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C. H. Lee, Jung B. Choi, J. S. Yook, S. J. Lee, K. W. Park, Soo Ho Bae, Hee Chul Lee, Choong-Ki Kim, Tae Won Kang, Jin-Ki Hong, Sun-Ung Kim, and Mann-Jang Park "HgCdTe-based quantum device nanofabrication", Proc. SPIE 3436, Infrared Technology and Applications XXIV, (26 October 1998); https://doi.org/10.1117/12.328073

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