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26 October 1998 More applications of uncooled microbolometer sensors
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Abstract
Lockheed Martin IR Imaging Systems is developing low cost, high performance, uncooled infrared imaging products for both military and commercial applications. These products are based on microbolometer technology, a silicon micromachined sensor that combines wafer level silicon processing with a device structure capable of yielding excellent imaging performance. Here, in the first of a series of papers, we report on several applications that are utilizing the Lockheed Martin microbolometer sensor. The performance of our basic uncooled sensor has been measured (and reported in multiple papers) to determine sensor capabilities for insertion into both military and commercial products. Non-linearity of the sensor over a scene temperature range of 95 degrees Celsius is less than 0.5%. Our sensors typically have temporal NETDs of less than 70 mK as well as spatial NETDs of less than 50 mK. MRTD performance is less than 0.4 degrees Celsius at spatial frequencies more than 20% beyond Nyquist. Spatial noise variation over time has been measured and found to meet both commercial and military requirements with excellent spatial noise over wide scene and ambient temperature ranges. Some of the multiple applications in which our uncooled sensors have been used have just recently been described in one report demonstrating the varied and unique uses of this product. Our sensor is now used by dozens of partners and customers for applications ranging from hand-held radiometric cameras to driving aids; from driver's aids to miniature cameras from rifle sights to radiometers. These applications will be discussed along with their unique system level performance parameters. Video will be used to demonstrate the various applications discussed.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thomas B. Breen, Neal R. Butler, Margaret Kohin, Charles A. Marshall, Robert Murphy, Todd W. Parker, and Raymond J. Silva "More applications of uncooled microbolometer sensors", Proc. SPIE 3436, Infrared Technology and Applications XXIV, (26 October 1998); https://doi.org/10.1117/12.328051
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