17 December 1998 High-gain wavelength dispersive spectrometer for light element x-ray microanalysis
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Abstract
We have developed a new type of X-Ray spectrometer intended for light element micro-analysis applications. This spectrometer typically has energy resolution better than 20 eV, very high count rates for low X-Ray energies characteristic of light elements, quasi-parallel data collection similar to Energy Dispersive Spectroscopy (EDS), weighs less than 20 lb., and is mechanically very simple. Fabrication of this spectrometer is possible due to our development of X-Ray collection/collimation optics for low X- Ray energy which collect large solid angles of sub-KeV x-rays and reflect them into a parallel beam. The spectrometer is intended for electron beam microanalysis, small spot XRF and other X-Ray micro-analysis methods. In this paper, we present the theory of operation, some details of collimator fabrication, spectrometer fabrication and some preliminary test data.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David B. O'Hara, David B. O'Hara, } "High-gain wavelength dispersive spectrometer for light element x-ray microanalysis", Proc. SPIE 3443, X-Ray and Ultraviolet Spectroscopy and Polarimetry II, (17 December 1998); doi: 10.1117/12.333612; https://doi.org/10.1117/12.333612
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