19 November 1998 Characterization and multilayer coating of cylindrical x-ray optics for x-ray astronomy
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Abstract
We are engaged in a program to develop focusing hard x-ray optics for future x-ray astronomy missions. Optics are being developed to focus x-rays up to and beyond 80 keV. Emphasis is on the multilayer coating of integral cylindrical optics which will provide the highest spatial resolution. A chamber geometry has been designed to allow the uniform coating of the inside surface of integral cylinders. The building and testing of this system has taken place over the past year. Linear DC magnetron cathodes are used to sputter the multilayer films. Initial results from both longitudinal and azimuthal uniformity coating tests are presented.
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Suzanne E. Romaine, John E. Everett, Ricardo J. Bruni, Adrian Ivan, Paul Gorenstein, "Characterization and multilayer coating of cylindrical x-ray optics for x-ray astronomy", Proc. SPIE 3444, X-Ray Optics, Instruments, and Missions, (19 November 1998); doi: 10.1117/12.331275; http://dx.doi.org/10.1117/12.331275
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KEYWORDS
Coating

Multilayers

X-ray optics

X-ray astronomy

Data modeling

Reflectivity

Semiconducting wafers

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