10 November 1998 Multilayer coatings with high reflectance in the EUV
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Multilayer coatings with a small number of layers were designed to give an increase in normal incidence reflectance in the extreme UV over that of the available single layer coatings. Multilayer coatings based on Al, MgF2 and SiC or B4C showed higher reflectance than single layers of SiC and B4C in the spectral region from 57.9 nm to 121.6 nm H Lyman (alpha) line and above. The major increase in reflectance was obtained at wavelengths close to 121.6 nm. Reflectance degraded slightly over time in the same way as single way as single layer coatings. Preliminary result have recently been obtained wit a second design based on a superposition of films of increasing refractive index form outermost to innermost layer, e.g. with multilayer coatings of SiC on B4C on diamond-like carbon. A combination of both designs, with multilayer coatings of the type Al/MgF2/DLC/B4C/SiC, results in further increase in the EUV reflectance, although their stability has not been determined yet.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Juan I. Larruquert, Juan I. Larruquert, Ritva A. M. Keski-Kuha, Ritva A. M. Keski-Kuha, } "Multilayer coatings with high reflectance in the EUV", Proc. SPIE 3445, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy IX, (10 November 1998); doi: 10.1117/12.330330; https://doi.org/10.1117/12.330330

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