Multilayer films for figured x-ray optics

David L. Windt

doi:10.1117/12.332515

11 December 1998 Multilayer films for figured x-ray optics

David L. Windt

Proceedings Volume 3448, Crystal and Multilayer Optics; (1998) https://doi.org/10.1117/12.332515
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

High reflectance multilayer films can now be deposited onto figured substrate to make focusing X-ray mirrors. In this paper, I discuss a variety of topics associated with the development and further refinement of such X-ray optics: high- efficiency multilayer films for use near normal incidence in the 170 - 300 Angstrom region; depth-graded multilayer films for broad-band reflectance in the 10 - 100 keV region; surface roughness and it's effect on mirror performance; and finally stresses in multilayer films.

Citation Download Citation

David L. Windt "Multilayer films for figured x-ray optics", Proc. SPIE 3448, Crystal and Multilayer Optics, (11 December 1998); https://doi.org/10.1117/12.332515

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