Translator Disclaimer
11 December 1998 Specular and diffuse x-ray scattering from tungsten/carbon multilayers having a high reflectivity at 10 keV
Author Affiliations +
Abstract
X-ray scattering measurements at 10 keV from multilayers having a period of 24.8 Angstrom and consisting of 100 W/C bilayers are reported. Specular scans revealed first order reflectivities in the range 73.5% to 78.0% with bandpasses in the range of 1.5% to 1.7%. Total roughness (or interface grading) values deduced from fitting were in the range 2.5 to 3.0 angstrom for the last-to-grow surface of the W layers. Diffuse scattering measurements were made in a novel geometry that permitted investigation of in-plane momentum transfers up to 0.2 Angstrom-1. This is roughly an order of magnitude larger than is possible in conventional rocking scans. A power law dependence of the diffuse scattering after integration over a 'Brillioun zone' is found. The exponent of this power law, 1.75, when interpreted using a logarithmic correlation function leads to a value of 1.0 angstrom for the correlated roughness.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Albert T. Macrander, Randall L. Headrick, Chian Liu, Jenny Erdmann, Ali M. Khounsary, Karl W. Smolenski, S. Felix Krasnicki, and Jozef Maj "Specular and diffuse x-ray scattering from tungsten/carbon multilayers having a high reflectivity at 10 keV", Proc. SPIE 3448, Crystal and Multilayer Optics, (11 December 1998); https://doi.org/10.1117/12.332517
PROCEEDINGS
12 PAGES


SHARE
Advertisement
Advertisement
Back to Top