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6 November 1998 Effects of feature orientation in tomographic reconstructions
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Abstract
We performed an x-ray nanotomography experiment at the Advanced Photon Source for the purpose of making a 3D image of a sample contain an integrated circuit interconnect. Nine projections of the sample were made over an angular range of 140 degrees using 1573 eV photons and scanning transmission x-ray microscope having a focal spot size of about 150 nm. Reconstructions of experimental and simulated data, using a simultaneous iterative reconstruction technique, show that a sample that is highly opaque along certain lines of sight must be strategically oriented with respect to the rotation axis to minimize the attenuation of photons through the sample and maximize the contrast in each image.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andrew R. Kalukin, Zachary H. Levine, Sean P. Frigo, Ian McNulty, and Markus Kuhn "Effects of feature orientation in tomographic reconstructions", Proc. SPIE 3449, X-Ray Microfocusing: Applications and Techniques, (6 November 1998); https://doi.org/10.1117/12.330353
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