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13 October 1998 Fields associated with the solid immersion lens
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Abstract
The principles of operation of the solid immersion lens (SIL) are described. Two types of SIL, the hemisphere and super-sphere, and their tolerances, are discussed. Several application of the SIL to microscopy, lithography, and optical storage are reviewed, along with a description of the theoretical considerations for determining the spot size, the effect of the air gap, and the effect of multiple- layer structures on the ellipticity of the spot.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gordon S. Kino "Fields associated with the solid immersion lens", Proc. SPIE 3467, Far- and Near-Field Optics: Physics and Information Processing, (13 October 1998); https://doi.org/10.1117/12.326811
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