13 October 1998 Near-field planar apertured probe array for optical near-field memory
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We proposed and demonstrated a novel silicon planar apertured probe array as a near-field optical head for optical memory. In comparison with the conventional fiber probe, the apertured probe array has durability, higher read-out data transmission rate and it allows us to overcome difficulty of precise mechanical tracking of the single fiber probe because it can be used for reading data as a surface information. The probe array was fabricated by utilizing wet etching technique of a silicon wafer. Inverted pyramids were formed on the silicon plate, and apertures were fabricated at the tops of the inverted pyramids. An aperture with a size less than 100nm was realized. By scanning the probe array we obtained resolved images of the lines in corrugation which was made on a metal thin film. The observed line width was 250 nm. Furthermore, we put spherical lens inside the inverted pyramids to focus the propagating light at the apertures automatically. The near- field intensity at an aperture was 16 times larger than that without a spherical lens.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Motonobu Kourogi, Takashi Yatsui, Shigeru Ishimura, M. B. Lee, Nobufumi Atoda, Kazuo Tsutsui, Motoichi Ohtsu, "Near-field planar apertured probe array for optical near-field memory", Proc. SPIE 3467, Far- and Near-Field Optics: Physics and Information Processing, (13 October 1998); doi: 10.1117/12.326827; https://doi.org/10.1117/12.326827

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