13 October 1998 Near-field planar apertured probe array for optical near-field memory
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We proposed and demonstrated a novel silicon planar apertured probe array as a near-field optical head for optical memory. In comparison with the conventional fiber probe, the apertured probe array has durability, higher read-out data transmission rate and it allows us to overcome difficulty of precise mechanical tracking of the single fiber probe because it can be used for reading data as a surface information. The probe array was fabricated by utilizing wet etching technique of a silicon wafer. Inverted pyramids were formed on the silicon plate, and apertures were fabricated at the tops of the inverted pyramids. An aperture with a size less than 100nm was realized. By scanning the probe array we obtained resolved images of the lines in corrugation which was made on a metal thin film. The observed line width was 250 nm. Furthermore, we put spherical lens inside the inverted pyramids to focus the propagating light at the apertures automatically. The near- field intensity at an aperture was 16 times larger than that without a spherical lens.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Motonobu Kourogi, Motonobu Kourogi, Takashi Yatsui, Takashi Yatsui, Shigeru Ishimura, Shigeru Ishimura, M. B. Lee, M. B. Lee, Nobufumi Atoda, Nobufumi Atoda, Kazuo Tsutsui, Kazuo Tsutsui, Motoichi Ohtsu, Motoichi Ohtsu, "Near-field planar apertured probe array for optical near-field memory", Proc. SPIE 3467, Far- and Near-Field Optics: Physics and Information Processing, (13 October 1998); doi: 10.1117/12.326827; https://doi.org/10.1117/12.326827


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