6 July 1998 Self-aligned ormosil waveguide devices
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This paper describes a method to passively align optical fibers with on-chip ormosil waveguide devices. One objective is to demonstrate that photosensitive sol-gel (ormosil) materials can be applied to fabricate a family of low-cost, high-quality, self-aligned microchip couplers. Feasibility of forming sol-gel waveguide couplers on silicon chips with on- chip V-grooves for passive alignment of ribbon fibers is studied. The optical waveguide material is deposited onto silicon wafers on which high precision alignment grooves are fabricated to support the input or output optical fibers. By forming V-grooves and wave-guides on the same substrate with precise dimensional control, passive optical alignment can be achieved. This passive alignment scheme can result in a large cost reduction for integrated optics' devices. Several cost- and labor-intensive manufacturing processes would be either eliminated or simplified. This scheme can be used for both single- and multi-mode applications. The method is particularly useful for interconnecting on-chip waveguiding devices with optical fiber ribbons, in which multi-fiber alignment is difficult by conventional active methods.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kewen K. Li, Kewen K. Li, Edward J. Salley, Edward J. Salley, Paul Melman, Paul Melman, Marvin J. Tabasky, Marvin J. Tabasky, Jing Zhao, Jing Zhao, Chia-Yen Li, Chia-Yen Li, } "Self-aligned ormosil waveguide devices", Proc. SPIE 3469, Organic-Inorganic Hybrid Materials for Photonics, (6 July 1998); doi: 10.1117/12.312920; https://doi.org/10.1117/12.312920

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