Paper
30 September 1998 Gauge blocks as length standards measured by interferometry or comparison: length definition, traceability chain, and limitations
Gerhard Boensch
Author Affiliations +
Abstract
The length of a gauge block is defined as the distance of a selected point of the measuring face to the plane surface of a platen which consists of the same material and has the same surface texture as the gauge block. With these idealized conditions of the definition, the probing errors due to opposed surfaces and due to the roughness are eliminated. It is assumed implicitly that the surface of the gauge is sufficiently flat so that symmetry in the wringing area is maintained. The assembly of gauge block and platen can be directly measured with an optical wave in an interferometer, and the measurement closely follows to the definition of the length unit>In practice, however, there are always deviations from these idealized conditions and corrections have to be applied. In particular, the wringing influence is important and effects are demonstrated by examples. Results obtained by interferometry are checked by comparison. Under optimum conditions, the comparison method allows nanometer accuracy to be achieved in the determination of length differences if gauges of the same material are compared so that probing errors are eliminated. Both methods have complementary properties and can be applied to systematic investigations. The aim is to obtain a system of gauge block standards consistent within the quoted uncertainties, independent of the method used.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gerhard Boensch "Gauge blocks as length standards measured by interferometry or comparison: length definition, traceability chain, and limitations", Proc. SPIE 3477, Recent Developments in Optical Gauge Block Metrology, (30 September 1998); https://doi.org/10.1117/12.323109
Lens.org Logo
CITATIONS
Cited by 12 scholarly publications.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Interferometry

Calibration

Interferometers

Quartz

Phase shifts

Sensors

Tungsten

RELATED CONTENT

The state of the art in swept wavelength laser Fizeau...
Proceedings of SPIE (August 01 2021)
Interferometric length measurements
Proceedings of SPIE (February 15 1993)
Assistance system for optical sensors
Proceedings of SPIE (June 17 2009)
Real-time image subtraction using phase reversal technique
Proceedings of SPIE (October 13 1999)
Optical figure testing by scanning deflectometry
Proceedings of SPIE (September 06 1999)

Back to Top