30 September 1998 Intercomparison of phase shifts in interferometric gauge block calibration
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A comparison of phase correction measurements by the stack method and by roughness measurements has been performed by the National Metrology Institutes of Sweden, Denmark, Norway and Finland. For a given technique the agreement between the participants is good, but the roughness measurements give consistently lower results for the phase correction than the stack method. This may be due to a systematic error in the stack results, originating from form errors.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mikael Frennberg, Mikael Frennberg, Reine Johansson, Reine Johansson, Jes Henningsen, Jes Henningsen, Steen-Ulrik Ipsen, Steen-Ulrik Ipsen, Bitten Poulsen, Bitten Poulsen, Helge Karlsson, Helge Karlsson, Heikki Lehto, Heikki Lehto, "Intercomparison of phase shifts in interferometric gauge block calibration", Proc. SPIE 3477, Recent Developments in Optical Gauge Block Metrology, (30 September 1998); doi: 10.1117/12.323120; https://doi.org/10.1117/12.323120


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