Intercomparison of phase shifts in interferometric gauge block calibration

Mikael Frennberg; Reine Johansson; Jes Henningsen; Steen-Ulrik Ipsen; Bitten Poulsen; Helge Karlsson; Heikki Lehto

doi:10.1117/12.323120

30 September 1998 Intercomparison of phase shifts in interferometric gauge block calibration

Mikael Frennberg, Reine Johansson, Jes Henningsen, Steen-Ulrik Ipsen, Bitten Poulsen, Helge Karlsson, Heikki Lehto

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Proceedings Volume 3477, Recent Developments in Optical Gauge Block Metrology; (1998) https://doi.org/10.1117/12.323120
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

A comparison of phase correction measurements by the stack method and by roughness measurements has been performed by the National Metrology Institutes of Sweden, Denmark, Norway and Finland. For a given technique the agreement between the participants is good, but the roughness measurements give consistently lower results for the phase correction than the stack method. This may be due to a systematic error in the stack results, originating from form errors.

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Mikael Frennberg, Mikael Frennberg, Reine Johansson, Reine Johansson, Jes Henningsen, Jes Henningsen, Steen-Ulrik Ipsen, Steen-Ulrik Ipsen, Bitten Poulsen, Bitten Poulsen, Helge Karlsson, Helge Karlsson, Heikki Lehto, Heikki Lehto, "Intercomparison of phase shifts in interferometric gauge block calibration", Proc. SPIE 3477, Recent Developments in Optical Gauge Block Metrology, (30 September 1998); doi: 10.1117/12.323120; https://doi.org/10.1117/12.323120

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