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30 September 1998 Interferometer for long gauge blocks up to 1000 mm and its measurement uncertainty
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Abstract
It is difficult to measure efficiently long gauge blocks by the interferometric method because long time is necessary for temperature run-in of long gauge blocks. The interferometer which can measure long gauge blocks up to 1000 mm has been developed by Mitutoyo Corporation. This interferometer is constructed with the optical system which can measure four gauge blocks one after another setting them once. The optical system of this interferometer can be easily adjusted and comparison measurements of gauge blocks by interferometry is also possible. As its light source, isotope lam p and laser are used. When the laser used, it is possible to measure directly 1000 mm. The uncertainty in measurement with this interferometer is evaluated as U equals 0.225 micrometers (k equals 2) for the case of 1000 mm long gauge block.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tatsuya Narumi, Yoshio Saruki, Taizo Nakamura, Shunji Shutoh, and Masaji Sawabe "Interferometer for long gauge blocks up to 1000 mm and its measurement uncertainty", Proc. SPIE 3477, Recent Developments in Optical Gauge Block Metrology, (30 September 1998); https://doi.org/10.1117/12.323093
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