30 September 1998 Phase shift on ceramic gauge blocks
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Abstract
The gauge block can realize the length of an object with the interferometric method.When light reflects on the measuring surface, the lag of phase occurs due to optical characteristics and surface roughness of the test piece. It is necessary to ad this correction value to the optical length obtained by the measurement. The investigation is carried out whether the phase shift correction used for steel gauge block to gauge block made of new material 'ceramics'.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shunji Shutoh, Shunji Shutoh, Hirofumi Moriyama, Hirofumi Moriyama, Masaji Sawabe, Masaji Sawabe, } "Phase shift on ceramic gauge blocks", Proc. SPIE 3477, Recent Developments in Optical Gauge Block Metrology, (30 September 1998); doi: 10.1117/12.323107; https://doi.org/10.1117/12.323107
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