Analyses of light diffracted on rough surfaces to measure in-plane displacements using a heterodyne interferometer

Tomasz S. Tkaczyk

doi:10.1117/12.312942

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30 June 1998 Analyses of light diffracted on rough surfaces to measure in-plane displacements using a heterodyne interferometer

Tomasz S. Tkaczyk

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Proceedings Volume 3478, Laser Interferometry IX: Techniques and Analysis; (1998) https://doi.org/10.1117/12.312942
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

Measurements of in-plane displacements of rough surfaces show strong influence of the sample structure on the registered signal. Rapid signal amplitude changes as function of sample position for various illumination angles introduce certain indeterminacy and can decrease the accuracy of the measurement system. To find measurements limits the experimental study of the flight diffracted on rough surfaces was performed. Experimental set-up with various illumination systems was built. To compensate environment influences the reference signal was applied. The notion of the probability of the heterodyne signal was introduced and determined for various illumination angles and surface treatments. A modification of heterodyne interferometry system for in-plane displacement measurements was proposed and discussed.

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Tomasz S. Tkaczyk "Analyses of light diffracted on rough surfaces to measure in-plane displacements using a heterodyne interferometer", Proc. SPIE 3478, Laser Interferometry IX: Techniques and Analysis, (30 June 1998); https://doi.org/10.1117/12.312942

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