You have requested a machine translation of selected content from our databases. This functionality is provided solely for your convenience and is in no way intended to replace human translation. Neither SPIE nor the owners and publishers of the content make, and they explicitly disclaim, any express or implied representations or warranties of any kind, including, without limitation, representations and warranties as to the functionality of the translation feature or the accuracy or completeness of the translations.
Translations are not retained in our system. Your use of this feature and the translations is subject to all use restrictions contained in the Terms and Conditions of Use of the SPIE website.
30 June 1998Analyses of light diffracted on rough surfaces to measure in-plane displacements using a heterodyne interferometer
Measurements of in-plane displacements of rough surfaces show strong influence of the sample structure on the registered signal. Rapid signal amplitude changes as function of sample position for various illumination angles introduce certain indeterminacy and can decrease the accuracy of the measurement system. To find measurements limits the experimental study of the flight diffracted on rough surfaces was performed. Experimental set-up with various illumination systems was built. To compensate environment influences the reference signal was applied. The notion of the probability of the heterodyne signal was introduced and determined for various illumination angles and surface treatments. A modification of heterodyne interferometry system for in-plane displacement measurements was proposed and discussed.
Tomasz S. Tkaczyk
"Analyses of light diffracted on rough surfaces to measure in-plane displacements using a heterodyne interferometer", Proc. SPIE 3478, Laser Interferometry IX: Techniques and Analysis, (30 June 1998); https://doi.org/10.1117/12.312942
The alert did not successfully save. Please try again later.
Tomasz S. Tkaczyk, "Analyses of light diffracted on rough surfaces to measure in-plane displacements using a heterodyne interferometer," Proc. SPIE 3478, Laser Interferometry IX: Techniques and Analysis, (30 June 1998); https://doi.org/10.1117/12.312942