30 June 1998 New simultaneous initialization and online phase calculation in ESPI displacement measurement
Author Affiliations +
Abstract
A new in-plane ESPI displacement sensor will be proposed.It is suitable for high frequent 1D displacement measurement with high accuracy. For this measurement an on-line phase calculation is used. This technique is based on a standard phase shift algorithm and leads to the 1D displacement of one object point. Introducing a new simultaneous initialization the decorrelation limit of the present speckle measurement will be exceeded. This will realize a continuous displacement measurement.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Harald Friebe, Harald Friebe, } "New simultaneous initialization and online phase calculation in ESPI displacement measurement", Proc. SPIE 3478, Laser Interferometry IX: Techniques and Analysis, (30 June 1998); doi: 10.1117/12.312953; https://doi.org/10.1117/12.312953
PROCEEDINGS
9 PAGES


SHARE
RELATED CONTENT


Back to Top