6 July 1998 Phase correction for coated-pole-tip recession measurement
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In the Pole Tip Recession (PTR) measurement using a Phase Shifting Interferometer (PSI), the phase shift due to the reflection at the air/thin film/dissimilar substrate interfaces will certainly cause incorrect PTR measurement. In this paper the effects of the variations in the refractive index of the materials and of coating thickness on the PTR measurement have been analyzed, and the PTR offsets and their errors have been calculated.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sen Han, "Phase correction for coated-pole-tip recession measurement", Proc. SPIE 3479, Laser Interferometry IX: Applications, (6 July 1998); doi: 10.1117/12.316440; https://doi.org/10.1117/12.316440

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