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21 September 1998 High-precision testing of optical components
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Proceedings Volume 3482, International Optical Design Conference 1998; (1998) https://doi.org/10.1117/12.322052
Event: International Optical Design Conference, 1998, Kona, HI, United States
Abstract
High quality lenses have reached a standarad where wavefront tolerances of a few nanometers for transmission and surface figure of individual components are necessary. The standard measuring tool in production is digital interferometry. To satisfy the demands of current and future production quality interferometruc equipment has to provide an overall accuracy below one nanometer under fabrication environment. This is reasonable, especially if "work man's rule" is applied demanding a tolerance/accuracy factor for metrology of ≥10:1. In this paper the limitations on interferometry for material and surface inspection as well as possible improvements are discussed.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bernd Doerband "High-precision testing of optical components", Proc. SPIE 3482, International Optical Design Conference 1998, (21 September 1998); https://doi.org/10.1117/12.322052
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